Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates

标题
Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates
作者
关键词
-
出版物
OPTICS EXPRESS
Volume 18, Issue 19, Pages 20086
出版商
The Optical Society
发表日期
2010-09-04
DOI
10.1364/oe.18.020086

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