Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching

标题
Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching
作者
关键词
-
出版物
OPTICS EXPRESS
Volume 17, Issue 10, Pages 8685
出版商
The Optical Society
发表日期
2009-05-09
DOI
10.1364/oe.17.008685

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