4.6 Article

Mask-less ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes

期刊

OPTICS EXPRESS
卷 17, 期 26, 页码 23522-23529

出版社

OPTICAL SOC AMER
DOI: 10.1364/OE.17.023522

关键词

-

类别

资金

  1. EU [PHOTOLYSIS - LSHMCT-2007-037765]
  2. Scottish Consortium in Integrated Microphotonic Systems
  3. EPSRC [EP/D078555/1, EP/F05999X/1, EP/F060076/1] Funding Source: UKRI
  4. Engineering and Physical Sciences Research Council [EP/F060076/1, EP/F05999X/1, EP/D078555/1] Funding Source: researchfish

向作者/读者索取更多资源

We report on an approach to ultraviolet (UV) photolithography and direct writing where both the exposure pattern and dose are determined by a complementary metal oxide semiconductor (CMOS) controlled micro-pixellated light emitting diode array. The 370nm UV light from a demonstrator 8 x 8 gallium nitride micro-pixel LED is projected onto photoresist covered substrates using two back-to-back microscope objectives, allowing controlled demagnification. In the present setup, the system is capable of delivering up to 8.8W/cm(2) per imaged pixel in circular spots of diameter similar to 8 mu m. We show example structures written in positive as well as in negative photoresist. (C) 2009 Optical Society of America

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

Article Computer Science, Hardware & Architecture

Performance analysis of SPAD-based optical wireless communication with OFDM

Shenjie Huang, Yichen Li, Cheng Chen, Mohammad Dehghani Soltani, Robert Henderson, Majid Safari, Harald Haas

Summary: In recent years, there has been a growing interest in using a single-photon avalanche diode (SPAD) in optical wireless communication (OWC). SPAD is operated in the Geiger mode and acts as a photon counting receiver, eliminating the need for a transimpedance amplifier. However, SPAD suffers from dead-time-induced nonlinearity. To improve the data rates of SPAD-based OWC systems, optical orthogonal frequency division multiplexing (OFDM) can be used. This paper provides a comprehensive theoretical analysis of SPAD-based OWC systems using direct-current-biased optical OFDM signaling, considering various factors such as signal clipping, SPAD nonlinearity, and signal-dependent shot noise. The impact of receiver nonlinearity on system performance is investigated through numerical results.

JOURNAL OF OPTICAL COMMUNICATIONS AND NETWORKING (2023)

Correction Optics

A full degree-of-freedom spatiotemporal light modulator

Christopher L. Panuski, Ian Christen, Momchil Minkov, Cole J. Brabec, Sivan Trajtenberg-Mills, Alexander D. Griffiths, Jonathan J. D. McKendry, Gerald L. Leake, Daniel J. Coleman, Cung Tran, Jeffrey St Louis, John Mucci, Cameron Horvath, Jocelyn N. Westwood-Bachman, Stefan F. Preble, Martin D. Dawson, Michael J. Strain, Michael L. Fanto, Dirk R. Englund

NATURE PHOTONICS (2023)

Article Optics

Development of a high-speed line-scanning fluorescence lifetime imaging microscope for biological imaging

Hanning Mai, Anneliese Jarman, Ahmet T. Erdogan, Conor Treacy, Neil Finlayson, Robert K. Henderson, Simon P. Poland

Summary: We developed a novel line-scanning microscope capable of high-speed TCSPC-based FLIM imaging. The system includes a laser line focus optically connected to a 1024 x 8 SPAD-based line-imaging CMOS with high acquisition rates. The high-speed FLIM platform demonstrated imaging capability in various biological applications.

OPTICS LETTERS (2023)

Article Optics

Efficient Reconstruction of Low Photon Count Images from a High Speed Camera

Graeme E. Johnstone, Johannes Herrnsdorf, Martin D. Dawson, Michael J. Strain

Summary: Challenging imaging applications that require ultra-short exposure times or imaging in photon-starved environments often have extremely low numbers of photons per pixel (<1 photon per pixel). To improve the image quality in such photon-sparse images, post-processing techniques, such as Bayesian retrodiction and bilateral filtering, can be used to estimate the number of photons detected and improve the spatial distributions in single-photon imaging applications. In this study, we demonstrate that at high frame rates (>1 MHz) and low incident photon flux (<1 photon per pixel), image post-processing techniques can provide better grayscale information and spatial fidelity of reconstructed images compared to simple frame averaging, with up to a 3-fold improvement in SSIM.

PHOTONICS (2023)

Article Engineering, Biomedical

Contactless WiFi Sensing and Monitoring for Future Healthcare-Emerging Trends, Challenges, and Opportunities

Yao Ge, Ahmad Taha, Syed Aziz Shah, Kia Dashtipour, Shuyuan Zhu, Jonathan Cooper, Qammer H. Abbasi, Muhammad Ali Imran

Summary: WiFi sensing has gained significant attention as a potential mechanism for remote monitoring of the aging population without deploying devices on users' bodies. It has the potential to detect critical events such as falls, sleep disturbances, and respiratory disorders. Unlike other sensing methods, WiFi technology is easy to implement and unobtrusive. This paper reviews the current state-of-the-art research on WiFi-based sensing and discusses its healthcare applications and open research challenges.

IEEE REVIEWS IN BIOMEDICAL ENGINEERING (2023)

Article Optics

Submerged single-photon LiDAR imaging sensor used for real-time 3D scene reconstruction in scattering underwater environments

Aurora Maccarone, Kristofer Rummond, Aongus Mccarthy, Ulrich K. S. Teinlehner, Julian Achella, Diego A. Guirre G. Arcia, Agata Pawlikowska, Robert A. Lamb, Robert K. Henderson, Stephen Mclaughlin, Yoann Altmann, Gerald S. Buller

Summary: We developed a fully submerged underwater LiDAR transceiver system using single-photon detection technologies. The system utilized a silicon single-photon avalanche diode (SPAD) detector array and picosecond resolution time-correlated single-photon counting for photon time-of-flight measurement. Real-time three-dimensional imaging was achieved through a joint surface detection and distance estimation algorithm. The system demonstrated high-resolution imaging of stationary and moving targets at depths of 1.8 meters and stand-off distances of up to 5.5 attenuation lengths.

OPTICS EXPRESS (2023)

Article Engineering, Electrical & Electronic

LoGait: LoRa Sensing System of Human Gait Recognition Using Dynamic Time Warping

Yao Ge, Wenda Li, Muhammad Farooq, Adnan Qayyum, Jingyan Wang, Zikang Chen, Jonathan Cooper, Muhammad Ali Imran, Qammer H. Abbasi

Summary: The LoGait system utilizes LoRa signals to recognize gait in indoor environments, overcoming challenges such as video quality, occlusion, and privacy concerns. It enables a larger sensing range of gait recognition compared to WiFi-based systems.

IEEE SENSORS JOURNAL (2023)

Article Chemistry, Analytical

Guided Direct Time-of-Flight Lidar Using Stereo Cameras for Enhanced Laser Power Efficiency

Filip Taneski, Istvan Gyongy, Tarek Al Abbas, Robert K. Henderson

Summary: This paper introduces a guided dToF approach for self-driving vehicles, which utilizes external guidance from other onboard sensors to provide an efficient solid-state lidar solution. It reduces data processing and storage requirements while mitigating multipath reflections.

SENSORS (2023)

Review Optics

Single-photon detection for long-range imaging and sensing

Robert h. Hadfield, Jonathan Leach, Fiona Fleming, Douglas j. Paul, Chee hing Tan, Jo shien Ng, Robert k. Henderson, Gerald s. Buller

Summary: The development of single-photon detectors with picosecond timing resolution has driven progress in time-correlated single-photon counting applications, including quantum optics, life sciences, and remote sensing. Advanced optoelectronic device architectures offer high-performance single-pixel devices and the ability to scale up to detector arrays, increasing single-photon sensitivity.

OPTICA (2023)

Article Optics

Video super-resolution for single-photon LIDAR

German Mora-Martin, Stirling Scholes, Lice Ruget, Robert Henderson, Jonathan Leach, Istvan Gyongy

Summary: In this paper, a 3D convolutional neural network (CNN) is trained using synthetic depth sequences to denoise and upscale (x4) depth data. Experimental results using synthetic and real ToF data demonstrate the effectiveness of the approach. With GPU acceleration, the approach achieves processing speeds of >30 frames per second, making it suitable for low-latency imaging.

OPTICS EXPRESS (2023)

Article Engineering, Electrical & Electronic

Advanced Transfer Printing With In-Situ Optical Monitoring for the Integration of Micron-Scale Devices

Benoit Guilhabert, Sean P. Bommer, Nils K. Wessling, Dimitars Jevtics, Jack A. Smith, Zhongyi Xia, Saptarsi Ghosh, Menno Kappers, Ian M. Watson, Rachel A. Oliver, Martin D. Dawson, Michael J. Strain

Summary: Transfer printing technology has been widely used for integrating planar membrane devices on photonic and electronic circuits. This work introduces an advanced transfer print system that allows printing of optical devices in non-planar geometries and enables in-situ optical monitoring. The system demonstrates the printing of micro-resonators coupled to on-chip waveguides, inverted device printing, and the assembly of micro-cavities with semiconductor micro-lenses and nanowire lasers. Non-standard substrates such as optical chip facets and single-mode fibre ends are also successfully printed. The in-situ optical coupling through the transfer printing system enables real-time active alignment of the printed devices.

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2023)

Article Engineering, Electrical & Electronic

Deep Ultraviolet CMOS-Controlled Micro Light-Emitting Diode Array

Jonathan J. D. McKendry, Enyuan Xie, Jordan Hill, Hichem Zimi, Johannes Herrnsdorf, Erdan Gu, Robert K. Henderson, Martin D. Dawson

Summary: This article reports a deep ultraviolet AlGaN micro-LED array driven by electronic drivers implemented in CMOS technology. The integrated device allows independent control of each micro-LED and has potential applications in various fields.

IEEE PHOTONICS JOURNAL (2023)

Article Engineering, Electrical & Electronic

Effects of LED Device Size on UV-C Short-Range LoS Optical Wireless Communication

Jordan Hill, Cheng Chen, Enyuan Xie, Jonathan J. D. Mckendry, Johannes Herrnsdorf, Erdan Gu, Harald Haas, Martin D. Dawson

Summary: We systematically investigate the performance of UV-C LEDs for optical wireless communication, focusing on the device size dependence. Smaller devices exhibit lower optical power but faster modulation speed. The study finds that a 60 μm diameter LED transmitter achieves the highest average SNR and SE, with a data transmission rate of up to 5.53 Gbps.

IEEE PHOTONICS JOURNAL (2023)

Article Biochemical Research Methods

Alignment-free construction of double emulsion droplet generation devices incorporating surface wettability contrast

Yunus Aslan, Olivia McGleish, Julien Reboud, Jonathan M. Cooper

Summary: This study presents an alignment-free spatial hydrophilic PDMS patterning technique for the generation of double emulsion droplets. The method successfully produces reliable and reproducible water-in-oil-in-water droplet emulsions without the need for complex processing steps. It can be applied to various fields, further expanding the applications of microfluidic techniques.

LAB ON A CHIP (2023)

暂无数据