Using deconvolution to improve the metrological performance of the grid method

标题
Using deconvolution to improve the metrological performance of the grid method
作者
关键词
-
出版物
OPTICS AND LASERS IN ENGINEERING
Volume 51, Issue 6, Pages 716-734
出版商
Elsevier BV
发表日期
2013-02-22
DOI
10.1016/j.optlaseng.2013.01.009

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