Quantum optical lithography from 1nm resolution to pattern transfer on silicon wafer

标题
Quantum optical lithography from 1nm resolution to pattern transfer on silicon wafer
作者
关键词
-
出版物
OPTICS AND LASER TECHNOLOGY
Volume 60, Issue -, Pages 80-84
出版商
Elsevier BV
发表日期
2014-02-05
DOI
10.1016/j.optlastec.2014.01.016

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