期刊
出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nima.2012.10.102
关键词
Autocollimator; Metrology; Slope error; Pentaprism; Optical slope measuring system; OSMS; LTP
类别
资金
- UChicago Argonne, LLC
- Argonne, a U.S. Department of Energy Office of Science laboratory [DE-AC02-06CH11357]
An optical slope measuring system (OSMS) was recently brought into operation at the Advanced Photon Source of the Argonne National Laboratory. This system is equipped with a precision autocollimator and a very accurate mirror-based pentaprism on a scanning stage and kept in an environment-controlled enclosure. This system has the capability to measure precision optics with sub-microradian rms slope errors as documented with a series of tests demonstrating accuracy, stability, reliability and repeatability. Measurements of a flat mirror with 0.2 mu rad rms slope error are presented which show that the variation of the slope profile measurements with the mirror setting at different locations along the scanning direction is only 60 nrad and the corresponding height error profile has 2 nm rms. (c) 2012 Elsevier B.V. All rights reserved.
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