期刊
出版社
ELSEVIER
DOI: 10.1016/j.nima.2009.07.017
关键词
Monolithic active pixel sensor; Transmission Electron Microscopy
类别
资金
- U.S. Department of Energy [DE-AC0205CH11231]
- Department of Energy
- Office of Science, Basic Energy Sciences
A cluster imaging technique for Transmission Electron Microscopy with a direct detection CMOS pixel sensor is presented. Charge centre-of-gravity reconstruction for individual electron clusters improves the spatial resolution and thus the point spread function. Data collected with a CIVICS sensor with 9.5 x 9.5 mu m(2) pixels show an improvement of a factor of two in point spread function to 2.7 mu m at 300 keV and of a factor of three in the image contrast, compared to traditional bright field illumination. (C) 2009 Elsevier B.V. All rights reserved.
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