Influence of doping elements on the formation rate of silicon nanowires by silver-assisted chemical etching

标题
Influence of doping elements on the formation rate of silicon nanowires by silver-assisted chemical etching
作者
关键词
Metal-assisted chemical etching, Silicon nanowires, Formation rate, Silicon-on-insulator
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 280, Issue -, Pages 37-42
出版商
Elsevier BV
发表日期
2015-08-11
DOI
10.1016/j.surfcoat.2015.08.013

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