期刊
NONLINEAR DYNAMICS
卷 67, 期 1, 页码 859-883出版社
SPRINGER
DOI: 10.1007/s11071-011-0031-5
关键词
MEMS; Duffing oscillator; Nonlinear damping; Saddle-node bifurcation; Parameter identification; Forced vibration
资金
- Intel Corporation
- Israeli Ministry of Science
- Israel Science foundation
- German Israel foundation
- Russell Berry foundation
Nonlinear elastic effects play an important role in the dynamics of microelectromechanical systems (MEMS). A Duffing oscillator is widely used as an archetypical model of mechanical resonators with nonlinear elastic behavior. In contrast, nonlinear dissipation effects in micromechanical oscillators are often overlooked. In this work, we consider a doubly clamped micromechanical beam oscillator, which exhibits nonlinearity in both elastic and dissipative properties. The dynamics of the oscillator is measured in both frequency and time domains and compared to theoretical predictions based on a Duffing-like model with nonlinear dissipation. We especially focus on the behavior of the system near bifurcation points. The results show that nonlinear dissipation can have a significant impact on the dynamics of micromechanical systems. To account for the results, we have developed a continuous model of a geometrically nonlinear beam-string with a linear Voigt-Kelvin viscoelastic constitutive law, which shows a relation between linear and nonlinear damping. However, the experimental results suggest that this model alone cannot fully account for all the experimentally observed nonlinear dissipation, and that additional nonlinear dissipative processes exist in our devices.
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