Oxidation and diffusion processes during annealing of TiSi(V)N films

标题

作者

关键词

TiSiVN system, Structural evolution, Oxidation, Oxide scale, Diffusion processes

出版物

Volume 275, Issue -, Pages 120-126

出版商

Elsevier BV

发表日期

2015-05-23

DOI

10.1016/j.surfcoat.2015.05.031

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