Study the target effect on the structural, surface and optical properties of TiO2 thin film fabricated by RF sputtering method

出版年份 2015 全文链接

标题

作者

关键词

TiO, 2, RF magnetron, Thin film, Optical properties

出版物

Volume 80, Issue -, Pages 215-221

出版商

Elsevier BV

发表日期

2014-11-17

DOI

10.1016/j.spmi.2014.10.029

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