Substrate temperature effects on the electrical properties of sputtered Al doped ZnO thin films

出版年份 2015 全文链接

标题

作者

关键词

Al doped ZnO, RF magnetron sputtering, Substrate temperature, Al content

出版物

Volume 85, Issue -, Pages 50-58

出版商

Elsevier BV

发表日期

2015-05-15

DOI

10.1016/j.spmi.2015.05.009

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