Phosphorus emitter engineering by plasma-immersion ion implantation for c-Si solar cells

标题
Phosphorus emitter engineering by plasma-immersion ion implantation for c-Si solar cells
作者
关键词
Ion implantation, Plasma-immersion, Crystalline silicon, Solar cell, Photovoltaics
出版物
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 133, Issue -, Pages 194-200
出版商
Elsevier BV
发表日期
2014-11-25
DOI
10.1016/j.solmat.2014.11.014

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