期刊
SOLAR ENERGY MATERIALS AND SOLAR CELLS
卷 133, 期 -, 页码 170-179出版社
ELSEVIER
DOI: 10.1016/j.solmat.2014.10.030
关键词
Polyethylene terephtalate; Ar plasma treatment; Surface modification; ZnO:Al; Adhesion; Thin film solar cell
资金
- Spanish Ministry of Science Innovation [ENE2010-21384-c04-01, IPT-420000-2010-6]
- Juan de la Cierva [JCI-2011-08815]
- CISTER [TEC2012-37958-C02-01]
The 0.4 mu m-thick Aluminum-doped Zinc Oxide (ZnO:Al) films were deposited at 100 degrees C on polyethylene terephthalate (PET) substrates by Radio Frequency (RF) magnetron sputtering. Prior to the AZO deposition, an Argon plasma treatment on the substrate surface was carried out by applying a RF bias power on it without intentional heating. The parameters varied in the etching process were the plasma etching time from 0 to 360 s, the RF bias power from 50 to 250 W, and the gas flux from 3 to 5 sccm. The effect of the substrate surface treatment on the mechanical stability, crystallinity and the optoelectronic properties of ZnO:Al thin films were evaluated. The results showed physically stable ZnO:Al films with good adherence to the substrate using appropriated plasma treatment parameters. This fact was attributed to physico/chemical PET surface modifications on the first few molecular layers after the plasma irradiation. The performance of flexible solar devices fabricated on optimized ZnO:Al thin films with adequate adhesion and optoelectronic properties was analysed. (C) 2014 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据