Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

SMALL

卷 11, 期 45, 页码 6013-6017

WILEY-V C H VERLAG GMBH

metal structures; nanofabrication; polymer brushes; scanning probe lithography; 3D patterns

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

1. Natural Science Foundation of China [51273167]
2. Hong Kong Polytechnic University [4-BCBM]