Multiphoton photoresists giving nanoscale resolution that is inversely dependent on exposure time

The Materials Challenge in Diffraction-Unlimited Direct-Laser-Writing Optical Lithography

(2010) Joachim Fischer et al.   ADVANCED MATERIALS

Nanoscale Photolithography with Visible Light

(2010) John T. Fourkas   Journal of Physical Chemistry Letters

Achieving  /20 Resolution by One-Color Initiation and Deactivation of Polymerization

(2009) L. Li et al.   SCIENCE

Confining Light to Deep Subwavelength Dimensions to Enable Optical Nanopatterning

(2009) T. L. Andrew et al.   SCIENCE

Two-Color Single-Photon Photoinitiation and Photoinhibition for Subdiffraction Photolithography

(2009) T. F. Scott et al.   SCIENCE

Recent progress in multiphoton microfabrication

(2008) S. Maruo et al.   Laser & Photonics Reviews