On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles
出版年份 2014 全文链接
标题
On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 25, Issue 35, Pages 355705
出版商
IOP Publishing
发表日期
2014-08-14
DOI
10.1088/0957-4484/25/35/355705
参考文献
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