3D hierarchical architectures based on self-rolled-up silicon nitride membranes

标题
3D hierarchical architectures based on self-rolled-up silicon nitride membranes
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 24, Issue 47, Pages 475301
出版商
IOP Publishing
发表日期
2013-11-01
DOI
10.1088/0957-4484/24/47/475301

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