Switch on, switch off: stiction in nanoelectromechanical switches

标题
Switch on, switch off: stiction in nanoelectromechanical switches
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 24, Issue 27, Pages 275501
出版商
IOP Publishing
发表日期
2013-06-13
DOI
10.1088/0957-4484/24/27/275501

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