Large-area nanoimprinting on various substrates by reconfigurable maskless laser direct writing

标题
Large-area nanoimprinting on various substrates by reconfigurable maskless laser direct writing
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 23, Issue 34, Pages 344012
出版商
IOP Publishing
发表日期
2012-08-10
DOI
10.1088/0957-4484/23/34/344012

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