期刊
NANOTECHNOLOGY
卷 22, 期 44, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/22/44/445301
关键词
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资金
- National Science Foundation (NSF)
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [0826131] Funding Source: National Science Foundation
Nano-graphene ribbons are promising in many electronic applications, as their bandgaps can be opened by reducing the widths, e.g. below 20 nm. However, a high-throughput method to pattern large-area nano-graphene features is still not available. Here we report a fabrication method of sub-20 nm ribbons on graphite stamps by nanoimprint lithography and a transfer-printing of the graphene ribbons to a Si wafer using electrostatic force assisted bonding. These methods provide a path for fast and high-throughput nano-graphene device production.
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