Solid-state diffusion as an efficient doping method for silicon nanowires and nanowire field effect transistors

标题
Solid-state diffusion as an efficient doping method for silicon nanowires and nanowire field effect transistors
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 21, Issue 43, Pages 435202
出版商
IOP Publishing
发表日期
2010-10-05
DOI
10.1088/0957-4484/21/43/435202

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