The structure and growth mechanism of Si nanoneedles prepared by plasma-enhanced chemical vapor deposition

标题
The structure and growth mechanism of Si nanoneedles prepared by plasma-enhanced chemical vapor deposition
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 21, Issue 41, Pages 415604
出版商
IOP Publishing
发表日期
2010-09-17
DOI
10.1088/0957-4484/21/41/415604

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