Local piezoelectric properties of ZnO thin films prepared by RF-plasma-assisted pulsed-laser deposition method

标题
Local piezoelectric properties of ZnO thin films prepared by RF-plasma-assisted pulsed-laser deposition method
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 21, Issue 23, Pages 235703
出版商
IOP Publishing
发表日期
2010-05-14
DOI
10.1088/0957-4484/21/23/235703

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