Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars

标题
Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 20, Issue 25, Pages 255305
出版商
IOP Publishing
发表日期
2009-06-03
DOI
10.1088/0957-4484/20/25/255305

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