期刊
NANOTECHNOLOGY
卷 20, 期 12, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/20/12/125302
关键词
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资金
- Spanish MEC [TEC2008-06756-C03-01, NAN2004-09109-C04-01, CSD2006-00019]
- CAM [S 0505ESP 0200]
- SANDIE Network of Excellence [NMP4-CT-2004-500101, TEP-0120]
- I3P
In this work, we present a fabrication process that combines atomic force microscopy (AFM) local oxidation nanolithography and molecular beam epitaxy (MBE) growth techniques in order to control both the nucleation site and number of InAs quantum dots (QDs) inside different motifs printed on GaAs(001) substrates. We find that the presence of B-type slopes (As terminated) inside the pattern motifs is the main parameter for controlling the selectivity of the pattern for InAs growth. We demonstrate that either single InAs QDs or multiple InAs QDs in a lateral arrangement (LQDAs) can be obtained, with a precise control in their position and QD number, simply by varying the fabricated oxide length along the [110] direction.
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