Parallel-local anodic oxidation of silicon surfaces by soft stamps

标题
Parallel-local anodic oxidation of silicon surfaces by soft stamps
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 19, Issue 43, Pages 435303
出版商
IOP Publishing
发表日期
2008-09-23
DOI
10.1088/0957-4484/19/43/435303

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