Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition

标题
Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 19, Issue 4, Pages 045302
出版商
IOP Publishing
发表日期
2008-01-05
DOI
10.1088/0957-4484/19/04/045302

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