☆ 4.6 Article

A ZnO nanowire vacuum pressure sensor

NANOTECHNOLOGY (2008)

期刊

NANOTECHNOLOGY

卷 19, 期 9, 页码 -

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IOP PUBLISHING LTD

DOI: 10.1088/0957-4484/19/9/095505

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Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied

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In this study, we report the growth and characterization of lateral ZnO nanowires (NWs) on ZnO: Ga/glass templates. Using x-ray diffraction and micro-Raman spectroscopy, it was found that crystal quality of the as-grown ZnO NWs is good. It was also found that the average length and average diameter of the laterally grown ZnO NWs were 5 mu m and 30 nm, respectively. A vacuum pressure sensor was then fabricated using a single NW bridging across two electrodes. By measuring the current-voltage characteristics of the samples at low pressure, we found that the currents were of 17, 34.28, 57.37 and 96.06 nA for the ZnO NW measured at 1 x 10(-3) Torr, 1 x 10(-4) Torr, 3 x 10(-5) Torr and 5 x 10(-6) Torr, respectively. These values suggest that the laterally grown ZnO NWs prepared in this study are potentially useful for vacuum pressure sensing.

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