Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 19, Issue 30, Pages 305302

出版商

IOP Publishing

发表日期

2008-06-17

DOI

10.1088/0957-4484/19/30/305302

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