期刊
NANOSCALE RESEARCH LETTERS
卷 6, 期 -, 页码 -出版社
SPRINGEROPEN
DOI: 10.1007/s11671-010-9782-z
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资金
- Engineering and Physical Science Research Council of UK [EP/D068606/1]
- National Natural and Science Foundation of China [60976075]
- Suzhou Science and Technology Bureau of China [SYG201007]
- Engineering and Physical Sciences Research Council [EP/D068606/1] Funding Source: researchfish
- EPSRC [EP/D068606/1] Funding Source: UKRI
La-doped zirconia films, deposited by ALD at 300 degrees C, were found to be amorphous with dielectric constants (k-values) up to 19. A tetragonal or cubic phase was induced by post-deposition annealing (PDA) at 900 degrees C in both nitrogen and air. Higher k-values (similar to 32) were measured following PDA in air, but not after PDA in nitrogen. However, a significant dielectric relaxation was observed in the air-annealed film, and this is attributed to the formation of nano-crystallites. The relaxation behavior was modeled using the Curie-von Schweidler (CS) and Havriliak-Negami (HN) relationships. The k-value of the as-deposited films clearly shows a mixed CS and HN dependence on frequency. The CS dependence vanished after annealing in air, while the HN dependence disappeared after annealing in nitrogen.
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