Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering

标题
Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering
作者
关键词
-
出版物
Nanoscale
Volume 6, Issue 24, Pages 14991-14998
出版商
Royal Society of Chemistry (RSC)
发表日期
2014-10-13
DOI
10.1039/c4nr05049e

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