Fast and reversible hydrogen sensing properties of Pd/Mg thin film modified by hydrophobic porous silicon substrate

标题
Fast and reversible hydrogen sensing properties of Pd/Mg thin film modified by hydrophobic porous silicon substrate
作者
关键词
Sputtering, Hydrophobicity, Hydrogen sensor, Thin films, Porous silicon, Anodization
出版物
SENSORS AND ACTUATORS B-CHEMICAL
Volume 213, Issue -, Pages 252-260
出版商
Elsevier BV
发表日期
2015-03-01
DOI
10.1016/j.snb.2015.02.098

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