Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function

标题
Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function
作者
关键词
-
出版物
NANO LETTERS
Volume 14, Issue 8, Pages 4406-4412
出版商
American Chemical Society (ACS)
发表日期
2014-06-25
DOI
10.1021/nl5013773

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