Article
Nanoscience & Nanotechnology
Hui Chen, Yihao Shi, Jiahao Qin, Guangshang Sheng, Cheng Zhang, Bingchang Zhang, Xiaohong Zhang
Summary: Ag-assisted chemical etching (AgACE) is a low-cost method to produce silicon nanowires (SiNWs) for photoelectric applications. The structure parameters, including array density, of SiNWs have a significant impact on their optical and photoelectric properties. This study experimentally investigates the effect of array density on the optical and photoelectric properties of SiNWs.
Article
Chemistry, Multidisciplinary
Julian A. Michaels, Lukas Janavicius, Xihang Wu, Clarence Chan, Hsieh-Chih Huang, Shunya Namiki, Munho Kim, Dane Sievers, Xiuling Li
Summary: This paper presents a plasma-free, open-circuit, photo-induced metal-assisted chemical etch method for fabricating micro and nanoscale features on Silicon carbide without causing high energy ion-related surface damage. The comprehensive exploration of parameter space demonstrates the controllability and versatility of this technique in producing ordered arrays of micro and nanoscale SiC structures with porous or solid sidewalls, while elucidating the etching mechanism.
ADVANCED FUNCTIONAL MATERIALS
(2021)
Article
Materials Science, Multidisciplinary
Shahnawaz Uddin, Md Roslan Hashim, Mohd Zamir Pakhuruddin
Summary: This study investigated the fabrication of b-Si absorber using the AACE process for the first time, and found that b-Si fabricated with a 12 nm thick aluminum film exhibited the lowest Ravg and highest broadband light absorption. The findings demonstrate the potential of the AACE process for producing b-Si with superior broadband light absorption, which is important for photovoltaic applications.
MATERIALS CHEMISTRY AND PHYSICS
(2021)
Article
Materials Science, Multidisciplinary
Chuhao Yao, Yue Zhao, Xiaomeng Zhang, Hailiang Li, Changqing Xie
Summary: A novel and facile scheme for fabricating highly uniform vertically aligned silicon nanowires (Si-NWs) arrays was presented, demonstrated numerically with excellent properties. The method involves fabricating thin gold (Au) nanostructures using magnetron sputtering followed by metal-assisted chemical etching at low temperature to achieve wafer-scale and highly uniform Si-NWs arrays. The Si-NWs arrays showed promising photoelectric conversion performance, with a maximum exciton generation rate of 1.76 x 10(24) and a reflectivity below 10% over a wide wavelength range at an annealing temperature of 200 degrees C.
RESULTS IN PHYSICS
(2021)
Review
Chemistry, Multidisciplinary
Antonio Alessio Leonardi, Maria Jose Lo Faro, Alessia Irrera
Summary: This article discusses the emerging technology of metal-assisted chemical etching (MACE) for the fabrication of silicon nanowires, comparing all the main routes for Si NWs and analyzing factors such as equipment cost, process complexity, repeatability, and the potential for commercial transfer in the field of microelectronics.
Article
Nanoscience & Nanotechnology
Wataru Kubota, Ryoya Yamaoka, Toru Utsunomiya, Takashi Ichii, Hiroyuki Sugimura
Summary: The vapor-phase etching assisted by graphene oxide enhances the etching reaction without the formation of a porous layer, and microcontact printing of graphene oxide can be combined with silicon etching to form micrometer-sized pores in desired areas.
ACS APPLIED NANO MATERIALS
(2022)
Article
Materials Science, Multidisciplinary
Haibin Li, Shinya Kato, Tetsuo Soga
Summary: Through comparing different concentration silicon, it was found that high-doped silicon has the highest etching rate, contrary to existing reports. In addition, severe lateral etching of high-doped silicon was observed. Therefore, it is necessary to re-understand the etching characteristics and mechanism of high-doped silicon.
MATERIALS RESEARCH EXPRESS
(2022)
Article
Engineering, Electrical & Electronic
Shahnawaz Uddin, Md. Roslan Hashim, Mohd Zamir Pakhuruddin
Summary: The study examined the impact of annealing temperature on the surface morphology and optical properties of b-Si fabricated using AACE process, finding that annealing at 400 degrees Celsius resulted in the formation of optimal surface features.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2021)
Article
Optics
Siyi Wang, Chao Xu, Man Chun Tam, Kailyn Vaillancourt, Zbigniew Wasilewski, Lan Wei, Dayan Ban
Summary: This study investigates the reversible lasing performance degradation on an uncoated actively-biased GaAs/Al0.45Ga0.55As mid-infrared quantum cascade laser (MIR-QCL) facet. The results show that thermal-induced facet oxidation is the main reason for the rapid degradation of the lasing performance in the early aging stage.
Article
Engineering, Electrical & Electronic
Tzu-Chieh Hong, Wen-Hsiang Lu, Yeong-Her Wang, Jiun-Yun Li, Yao-Jen Lee, Tien-Sheng Chao
Summary: Germanium-tin (GeSn) epitaxy layer was grown on an 8-inch SOI wafer with a Ge buffer layer. The etching rates of different solutions for the GeSn layer were investigated. The developed two-step etching process allows the selective etching of the Ge buffer and Si bottom layers, facilitating the fabrication of GeSn nanowires (NWs). GeSn NWFETs were successfully fabricated and the strain of the GeSn NW channels was preserved using the proposed optimized fabrication process.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2023)
Review
Green & Sustainable Science & Technology
Mohammad Yasir Arafat, Mohammad Aminul Islam, Ahmad Wafi Bin Mahmood, Fairuz Abdullah, Mohammad Nur-E-Alam, Tiong Sieh Kiong, Nowshad Amin
Summary: The article reviews the metal-assisted chemical etching (MACE) technique and its application in the fabrication of black silicon (BSi) solar cells, focusing on the characteristics and roles of Ag, Cu, and Ni as metal catalysts. The study found that Ag-etched BSi wafers are more suitable for high-quality and efficient Si solar cells, while Cu and Ni are more appropriate for mass production of BSi solar cells. Additionally, Ni-assisted chemical etching process takes longer than Cu but Ni-etched BSi solar cells exhibit enhanced light absorption capacity and lower activity in terms of the dissolution and oxidation process compared to Cu-etched BSi solar cells.
Article
Materials Science, Coatings & Films
Konstantina Christina Topka, Babacar Diallo, Diane Samelor, Raphael Laloo, Daniel Sadowski, Cecile Genevois, Thierry Sauvage, Francois Senocq, Hugues Vergnes, Viviane Turq, Nadia Pellerin, Brigitte Caussat, Constantin Vahlas
Summary: An innovative O-2/O-3 assisted CVD process has been proposed in this study for the deposition of silica-based materials with tunable functionalities at moderate temperature, allowing for control over carbon content and water contact angle by adjusting precursor chemistry. The impact of deposition temperature on liquid corrosion resistance has been investigated, showing variations in etching rates for different types of films. The addition of HMDS to TEOS chemistry has been demonstrated to modulate film composition and functional properties, offering the potential for developing new sacrificial films.
SURFACE & COATINGS TECHNOLOGY
(2021)
Article
Energy & Fuels
David M. Pera, Ivo Costa, Filipe Serra, Guilherme Gaspar, Killian Lobato, Joao M. Serra, Jose A. Silva
Summary: In this study, a one-step metal-assisted chemical etching (MACE) method was used to reduce the reflectivity of monocrystalline silicon (mono c-Si) wafers. The method utilized hydrogen peroxide (H2O2) and hydrofluoric acid (HF) as etchants and silver (Ag) as reaction catalyst. The results showed that solutions with a lower molar ratio (rho) were more reactive and achieved a faster etching process. The MACE process effectively reduced the reflectance in the range 350-1100 nm, with a minimum reflectivity of 3.0% for rho = 0.916.
SOLAR ENERGY MATERIALS AND SOLAR CELLS
(2023)
Article
Chemistry, Multidisciplinary
Debadrita Paria, Annalisa Convertino, Piyush Raj, Kristine Glunde, Yun Chen, Ishan Barman
Summary: Nanotechnology has enabled the development of next generation biomedical devices that interact with living cells at the nanostructure level. By studying the response of cells to different stimuli in 3D microenvironments, researchers are able to harness specific cues for potential applications such as bioassays and tissue printing technologies. The study on randomly oriented nanowire substrates provides insights into the interaction between cancer cells and synthetic surfaces, showing varying attachment preferences of primary and secondary cancer cells.
ADVANCED FUNCTIONAL MATERIALS
(2021)
Article
Materials Science, Multidisciplinary
Nikita Grevtsov, Eugene Chubenko, Vladimir Petrovich, Vitaly Bondarenko, Ilya Gavrilin, Alexey Dronov, Sergey Gavrilov
Summary: In this study, we evaluated the electrodeposition of indium in silicon nanowire arrays fabricated by silver-assisted chemical etching. The results showed that indium particles can be exclusively formed at the bottom of each pore on the residual silver particles under appropriate pulsed-mode electrodeposition conditions, which is different from the irregular pore filling observed in continuous galvanostatic deposition.
Article
Chemistry, Physical
Weon-Guk Kim, Il-Woong Tcho, Daewon Kim, Seung-Bae Jeon, Sang-Jae Park, Myeong-Lok Seol, Yang-Kyu Choi
Article
Nanoscience & Nanotechnology
Seung-Bae Jeon, Myeong-Lok Seol, Daewon Kim, Sang-Jae Park, Yang-Kyu Choi
ADVANCED ELECTRONIC MATERIALS
(2016)
Article
Nanoscience & Nanotechnology
Daewon Kim, Sang-Jae Park, Seung-Bae Jeon, Myeong-Lok Seol, Yang-Kyu Choi
ADVANCED ELECTRONIC MATERIALS
(2016)
Article
Nanoscience & Nanotechnology
Jae-Hyuk Ahn, Dong-Il Moon, Seung-Won Ko, Chang-Hoon Kim, Jee-Yeon Kim, Moon-Seok Kim, Myeong-Lok Seol, Joon-Bae Moon, Ji-Min Choi, Jae-Sub Oh, Sung-Jin Choi, Yang-Kyu Choi
Article
Chemistry, Physical
Myeong-Lok Seol, Seung-Bae Jeon, Jin-Woo Han, Yang-Kyu Choi
Article
Multidisciplinary Sciences
Dongil Lee, Jinsu Yoon, Juhee Lee, Byung-Hyun Lee, Myeong-Lok Seol, Hagyoul Bae, Seung-Bae Jeon, Hyejeong Seong, Sung Gap Im, Sung-Jin Choi, Yang-Kyu Choi
SCIENTIFIC REPORTS
(2016)
Article
Chemistry, Physical
Sang-Jae Park, SangHan Lee, Myeong-Lok Seol, Seung-Bae Jeon, Hagyoul Bae, Daewon Kim, Gyu-Hyeong Cho, Yang-Kyu Choi
Article
Chemistry, Physical
Myeong-Lok Seol, Inho Nam, Erick L. Ribeiro, Becca Segel, Dongil Lee, Tyler Palma, Honglu Wu, Dibyendu Mukherjee, Bamin Khomami, Curtis Hill, Jin-Woo Han, M. Meyyappan
ACS APPLIED ENERGY MATERIALS
(2020)
Editorial Material
Chemistry, Physical
Alexis Maurel, Ana C. Martinez, Donald A. Dornbusch, William H. Huddleston, Myeong-Lok Seol, Christopher R. Henry, Jennifer M. Jones, Bharat Yelamanchi, Sina Bakhtar Chavari, Jennifer E. Edmunson, Sreeprasad T. Sreenivasan, Pedro Cortes, Eric MacDonald, Cameroun G. Sherrard
ACS ENERGY LETTERS
(2023)
Article
Chemistry, Multidisciplinary
Jin-Woo Han, Myeong-Lok Seol, M. Meyyappan
Summary: A nanoscale field emission vacuum channel gated diode structure with a tungsten cathode of umbrella-like geometry and sharp vertical edge has been proposed. The fabricated devices exhibit excellent diode characteristics and low gate leakage due to the unique design where the bottom silicon plate acts as the gate and the anode terminal is positioned between the umbrella cathode and the gate.
NANOSCALE ADVANCES
(2021)
Article
Nanoscience & Nanotechnology
Jin-Woo Han, Myeong-Lok Seol, Jungsik Kim, M. Meyyappan
ACS APPLIED NANO MATERIALS
(2020)
Article
Engineering, Electrical & Electronic
Myeong-Lok Seol, Ellie Sadatian, Seohyeon Jang, Curtis Hill, Inho Nam, Jin-Woo Han, M. Meyyappan
ACS APPLIED ELECTRONIC MATERIALS
(2020)
Article
Engineering, Electrical & Electronic
Jin-Woo Han, Myeong-Lok Seol, Dong-Il Moon, Gary Hunter, M. Meyyappan
NATURE ELECTRONICS
(2019)
Article
Chemistry, Multidisciplinary
Kyung Jean Yoon, Jin-Woo Han, Dong-Il Moon, Myeong Lok Seol, M. Meyyappan, Han Joon Kim, Cheol Seong Hwang
NANOSCALE ADVANCES
(2019)
Article
Engineering, Mechanical
Sang-Jae Park, Sungho Kim, Myeong-Lok Seol, Seung-Bae Jeon, Il-Woong Tcho, Daewon Kim, Yang-Kyu Choi
EXTREME MECHANICS LETTERS
(2018)