Pore Size Control of Ultrathin Silicon Membranes by Rapid Thermal Carbonization

标题
Pore Size Control of Ultrathin Silicon Membranes by Rapid Thermal Carbonization
作者
关键词
-
出版物
NANO LETTERS
Volume 10, Issue 10, Pages 3904-3908
出版商
American Chemical Society (ACS)
发表日期
2010-09-15
DOI
10.1021/nl101602z

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