High-Resolution PFPE-based Molding Techniques for Nanofabrication of High-Pattern Density, Sub-20 nm Features: A Fundamental Materials Approach

标题
High-Resolution PFPE-based Molding Techniques for Nanofabrication of High-Pattern Density, Sub-20 nm Features: A Fundamental Materials Approach
作者
关键词
-
出版物
NANO LETTERS
Volume 10, Issue 4, Pages 1421-1428
出版商
American Chemical Society (ACS)
发表日期
2010-02-24
DOI
10.1021/nl100326q

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