High-aspect-ratio nanoporous membranes made by reactive ion etching and e-beam and interference lithography

标题
High-aspect-ratio nanoporous membranes made by reactive ion etching and e-beam and interference lithography
作者
关键词
Nanoporous Membrane, Interference Lithography, Hard Mask, Broad Pore Size Distribution, Si3N4 Layer
出版商
Springer Nature
发表日期
2013-10-12
DOI
10.1007/s00542-013-1932-7

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