Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy

标题
Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy
作者
关键词
-
出版商
Springer Nature
发表日期
2012-01-07
DOI
10.1007/s00542-011-1415-7

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