期刊
出版社
SPRINGER
DOI: 10.1007/s00542-010-1200-z
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This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 x 10(-3) cm(3). Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method.
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