Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology

出版年份 2008 全文链接

标题

Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology

作者

关键词

-

出版物

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Volume 14, Issue 9-11, Pages 1359-1365

出版商

Springer Nature

发表日期

2008-01-08

DOI

10.1007/s00542-007-0501-3

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Protocol

Reagent

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