期刊
MICROSCOPY RESEARCH AND TECHNIQUE
卷 75, 期 4, 页码 484-491出版社
WILEY-BLACKWELL
DOI: 10.1002/jemt.21081
关键词
atom probe; atom probe tomography; focused ion beam; interface; grain boundaries; lift-out; site specific; ion damage
资金
- Australian Research Council (ARC)
- Australian Microscopy & Microanalysis Research Facility (AMMRF) at the University of Sydney
- AMMRF
- Austrian Industriellenvereiningung
Atom probe tomography (APT) is a mass spectrometry method with atomic-scale spatial resolution that can be used for the investigation of a wide range of materials. The main limiting factor with respect to the type of problems that can be addressed is the small volume investigated and the randomness of common sample preparation methods. With existing site-specific specimen preparation methods it is still challenging to rapidly and reproducibly produce large numbers of successful samples from specifically selected grain boundaries or interfaces for systematic studies. A new method utilizing both focused ion beam (FIB) and transmission electron microscopy (TEM) is presented that can be used to reproducibly produce damage-free atom probe samples with features of interest at any desired orientation with an accuracy of better than 50 nm from samples that require very little prior preparation. Microsc. Res. Tech. 2011. (C) 2011 Wiley-Liss, Inc.
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