Three-Dimensional Measurement of Line Edge Roughness in Copper Wires Using Electron Tomography

标题
Three-Dimensional Measurement of Line Edge Roughness in Copper Wires Using Electron Tomography
作者
关键词
-
出版物
MICROSCOPY AND MICROANALYSIS
Volume 15, Issue 03, Pages 244-250
出版商
Cambridge University Press (CUP)
发表日期
2009-05-22
DOI
10.1017/s143192760909028x

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