Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM

The Successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, Custom built at a small number of sites to common instruments in many modern laboratories. Here we describe sonic initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype unproved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 angstrom can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.