Pure-silica zeolite thin films by vapor phase transport of fluoride for low-k applications

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 128, Issue 1-3, Pages 12-18

出版商

Elsevier BV

发表日期

2009-08-06

DOI

10.1016/j.micromeso.2009.07.023

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now