Comparative study of the rate and locality of silica deposition during the CVD treatment of porous membranes with TEOS and TMOS

标题
Comparative study of the rate and locality of silica deposition during the CVD treatment of porous membranes with TEOS and TMOS
作者
关键词
-
出版物
MICROPOROUS AND MESOPOROUS MATERIALS
Volume 120, Issue 1-2, Pages 177-185
出版商
Elsevier BV
发表日期
2008-09-27
DOI
10.1016/j.micromeso.2008.08.063

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