Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 5, Issue 4, Pages 517-528

出版商

Springer Nature

发表日期

2008-02-18

DOI

10.1007/s10404-008-0264-x

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