Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500°C

标题
Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500°C
作者
关键词
-
出版物
MICROELECTRONICS JOURNAL
Volume 45, Issue 12, Pages 1822-1828
出版商
Elsevier BV
发表日期
2014-05-14
DOI
10.1016/j.mejo.2014.04.034

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