Effect of annealing on the structural, optical and electrical properties of ITO films by RF sputtering under low vacuum level

出版年份 2008 全文链接

标题

Effect of annealing on the structural, optical and electrical properties of ITO films by RF sputtering under low vacuum level

作者

关键词

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出版物

MICROELECTRONICS JOURNAL

Volume 39, Issue 12, Pages 1444-1451

出版商

Elsevier BV

发表日期

2008-07-30

DOI

10.1016/j.mejo.2008.06.081

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