Preparation of porous alumina-g-polystyrene sulfonic acid abrasive and its chemical mechanical polishing behavior on hard disk substrate

标题
Preparation of porous alumina-g-polystyrene sulfonic acid abrasive and its chemical mechanical polishing behavior on hard disk substrate
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 116, Issue -, Pages 11-16
出版商
Elsevier BV
发表日期
2013-11-26
DOI
10.1016/j.mee.2013.11.004

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